IMID 2022, Pusan, Korea
August 23 - August 26, 2022 (Tue. - Fri.), Bexco
Monolithic Circuit Integrated with VOC Sensor Based on a-IGZO TFT
Eseudeo Yun, Yongchan Kim, Hanbin Choi, Do Hwan Kim, and Hojin Lee
Abstract
As volatile organic compound (VOCs) gases generated in industrial production lines is harmful to the human
body, study on detecting VOCs gases has attracted much interest. For detection of various VOCs, Amorphous
oxide semiconductors (AOS) have been highly researched to produce high-sensitivity chemoresistive-type VOCs
gas sensors. Especially, amorphous indium gallium zinc oxide (a-IGZO) thin film transistors (TFTs) are
considered the most promising candidate for gas sensors, thanks to their high field-effect mobility, low leakage
current, good uniformity, and superior electrical stability with the low-temperature process. However, a-IGZObased gas sensors reported so far still remain in an early stage such as for resistor-type sensor or a single TFT. In this talk, we proposed a monolithic sensor circuit with high sensitivity capable of amplifying the sensing
signal of the solution-processed a-IGZO sensor TFT.
